WebLithography Overviews Positive vs. Negative Tone Photoresists Subtractive vs. Additive Process > Positive tone resists The resist is exposed with UV light where the underlying material is to be removed. In these resists, exposure to the UV light changes the chemical structure of the resist so that it becomes more soluble in the developer. Webfunctional lithographic responses are summarized in Table 2. Process Parameters (Refer to Figures 8 thru 10) Substrate Silicon Coat 12,300Å Softbake 115°C/60 seconds Hotplate Expose Nikon 1505 G6E G-Line (0.54 NA) Develop MF-321 /15 + 50 DSP @ 21°C MICROPOSIT S1813 PHOTO RESIST with MICROPOSIT MF-321 DEVELOPER Table …
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